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filingDate 2011-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9030002-B2
titleOfInvention Semiconductor device having IPD structure with smooth conductive layer and bottom-side conductive layer
abstract A semiconductor device includes an interface layer, a smooth conductive layer disposed over the interface layer, and a first insulating layer disposed over a first surface of the smooth conductive layer. A first conductive layer is disposed over the first insulating layer and the interface layer, and the first conductive layer contacts the first insulating layer. A second insulating layer is disposed over the second insulating layer and the first conductive layer, and a second conductive layer is disposed below the first conductive layer and contacts a second surface of the smooth conductive layer. The second surface of the smooth conductive layer is opposite the first surface of the smooth conductive layer. A third insulating layer is disposed over the first insulating layer and the first surface of the smooth conductive layer, and a fourth insulating layer is disposed below the second conductive layer and the interface layer.
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