| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K5-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K5-48 |
| filingDate |
2013-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd387bf696d3166b630a637a35eca73d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9f4ac9f16499b5be841cb4fe59be7f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2a2d3b2962540e24d65160ace2b9744 |
| publicationDate |
2015-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9028139-B2 |
| titleOfInvention |
Method of measuring temperature of component in processing chamber of substrate processing apparatus |
| abstract |
A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016195436-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9500537-B2 |
| priorityDate |
2011-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |