| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242789508fcc9b52c84a82ac211a6774 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4133 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
| filingDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_622d5b0797298a3a35c742d6a946edc4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee054964bf5abc7ef6d4b7915201b8fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f25f57251194ca4bbb0a1f127365d15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_121a11d47d12e925b5428dcb60ec65b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a5fb317c02af0b6d6d8af84c3ce714b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bf421cf5fd5ab1c4568d0eb77a15482 |
| publicationDate |
2015-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9019483-B2 |
| titleOfInvention |
Method to extend single wavelength ellipsometer to obtain spectra of refractive index |
| abstract |
Methods are provided to use data obtained from a single wavelength ellipsometer to determine the refractive index of materials as a function of wavelength for thin conductive films. The methods may be used to calculate the refractive index spectrum as a function of wavelength for thin films of metals, and conductive materials such as conductive metal nitrides or conductive metal oxides. |
| priorityDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |