| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f115214a8539f6c1ff729bf3f08e742c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a04c9848201a4f3879eae83bb24e8e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a25a0b23a1ca46405ec122223928e01 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31722
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0437
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31774
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0435 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
| filingDate |
2010-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eacabe81799ca55458a596f2e8e0acb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48a5936d692c8aace0f2f1b91616e93f |
| publicationDate |
2015-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8987677-B2 |
| titleOfInvention |
Charged particle multi-beamlet lithography system, modulation device, and method of manufacturing thereof |
| abstract |
The invention relates to a modulation device for use in a charged particle multi-beamlet lithography system. The device includes a body comprising an interconnect structure provided with a plurality of modulators and interconnects at different levels within the interconnect structure for enabling connection of the modulators to one or more pattern data receiving elements. A modulator includes a first electrode, a second electrode, and an aperture extending through the body. The electrodes are located on opposing sides of the aperture for generating an electric field across the aperture. At least one of the first electrode and the second electrode includes a first conductive element formed at a first level of the interconnect structure and a second conductive element formed at a second level of the interconnect structure. The first and second conductive elements are electrically connected with each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016155600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I759664-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I743470-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9530610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019211072-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10879032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11232928-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11538655-B2 |
| priorityDate |
2009-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |