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publicationDate 2015-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8962747-B2
titleOfInvention Resist underlayer composition and process of producing integrated circuit devices using the same
abstract A resist underlayer composition includes a solvent, and an organosilane condensation polymerization product of: a compound represented by the following Chemical Formula 1, a compound represented by the following Chemical Formula 2, and a compound represented by the following Chemical Formula 3,n n[R 1 O] 3 Si—X  [Chemical Formula 1]n n[R 2 O] 3 Si—R 3   [Chemical Formula 2]n n[R 4 O] 3 Si—Si[OR 5 ] 3 .  [Chemical Formula 3]
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