| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_af4ed0f969cb72157509c36e3a585004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f6bd93eefe0b750cb1c7db0335fa32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c24c2c82c7b40b143bd0ba243bd6fc01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97014be1435a411a26b43ddd2f0ee8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0a7a92c88792053cd6492a1d45ec702 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-048 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2011-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94eacea30ef8cfd205c3d5683554715c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0c20d05253ec8e439ee744ce7cc254a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b956fca0a32bb2f5c6c528fa2994db73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a05532e5800f94c98676c7d2317b6e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8f5845fa047c78d05939a8ce484bb67 |
| publicationDate |
2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8951816-B2 |
| titleOfInvention |
Film forming method |
| abstract |
One embodiment of the present invention is a film forming method comprising: arranging a surface of a film formation substrate 10 including an absorption layer 12 on a first substrate 11 and a material layer 13 containing a film formation material and a surface of a film-formation target substrate 20 including a first layer 23 over a second substrate 22 , so as to face each other; forming a second layer 13 a containing the film formation material over the first layer 23 by performing first heat treatment on the material layer 13 ; and forming a third layer 13 b containing the film formation material over the second layer 13 a by performing second heat treatment on the material layer 13 . In the second heat treatment, energy with a density higher than that in the first heat treatment is applied to the material layer. |
| priorityDate |
2010-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |