http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8920214-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a85177812b5ec619bf1e37048407dd1c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-017 |
| filingDate | 2012-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf15f248dfb0e9817b0fe8baded9fbc1 |
| publicationDate | 2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8920214-B2 |
| titleOfInvention | Dual dressing system for CMP pads and associated methods |
| abstract | Dual dressing systems for conditioning CMP pads, including associated methods, are provided. In one aspect, for example, a method of dressing a CMP pad can include applying a deglazing dresser to a working surface of a CMP pad, deglazing the working surface of the CMP pad with the deglazing dresser, applying an asperity-forming dresser to the working surface of the CMP pad, and forming asperities in the working surface of the CMP pad with the asperity-forming dresser. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10857651-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847652-B2 |
| priorityDate | 2011-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.