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publicationDate 2014-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8916483-B2
titleOfInvention Methods of forming semiconductor structures including III-V semiconductor material using substrates comprising molybdenum
abstract Methods of fabricating semiconductor structures include the formation of molybdenum nitride at one or more surfaces of a substrate comprising molybdenum, and providing a layer of III-V semiconductor material, such as GaN, over the substrate. Semiconductor structures formed by methods described herein may include a substrate comprising molybdenum, molybdenum nitride at one or more surfaces of the substrate, and a layer of GaN bonded to the molybdenum nitride.
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