| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J123-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D145-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L57-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D145-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J123-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2013-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fa01dd042e4435f4e9e89f0e3f9ff69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20aebb88e411f2902f1ef69e7fbc9824
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4057cb86f9f3106523931a51c078ca56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd557248518224ecbf2da6e2e1db38a1 |
| publicationDate |
2014-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8889557-B2 |
| titleOfInvention |
Substrate treating method, temporary fixing composition and semiconductor device |
| abstract |
The invention provides a substrate treating method which can favorably prevent damages to a substrate when the substrate is separated from a support, thus achieving a high yield. The substrate treating method includes, in the sequence set forth, a step 1 of temporarily fixing a substrate onto a support via a temporary fixing material to form a stack, the temporary fixing material including at least a temporary fixing material (I) containing a cycloolefin polymer (A) and a compound (B) having a structure (b1) such as a dialkyl silicone structure, and a structure (b2) such as a polyoxyalkylene structure, a step 2 of processing the substrate and/or transporting the stack, and a step 3 of applying a force to the substrate or the support in a direction substantially perpendicular to the plane of substrate to separate the substrate from the support. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11186757-B2 |
| priorityDate |
2012-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |