| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c95659b2f89ce5bb8f97fe754382c50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97014be1435a411a26b43ddd2f0ee8f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_42f6bd93eefe0b750cb1c7db0335fa32 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-3211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0008 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-44 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate |
2011-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c85441ba121fce4d4b431647b8a19ccf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a47f6a5d14947cb40b475653d87383d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8693534642be68138697ba18e1506036 |
| publicationDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8859438-B2 |
| titleOfInvention |
Vapor deposition method, vapor deposition device and organic EL display device |
| abstract |
A coating film ( 90 ) is formed by causing vapor deposition particles ( 91 ) to pass through a mask opening ( 71 ) of a vapor deposition mask and adhere to a substrate, the vapor deposition particles ( 91 ) being discharged from a vapor deposition source opening ( 61 ) of a vapor deposition source ( 60 ) while the substrate ( 10 ) is moved relative to the vapor deposition mask ( 70 ) in a state in which the substrate ( 10 ) and the vapor deposition mask ( 70 ) are spaced apart at a fixed interval. When a direction that is orthogonal to a normal line direction of the substrate and is orthogonal to a relative movement direction of the substrate is defined as a first direction, and the normal line direction of the substrate is defined as a second direction, a plurality of control plate columns are disposed in the first direction between the vapor deposition source opening and the vapor deposition mask, each control plate column including a plurality of control plates ( 80 a and 80 b ) arranged along the second direction. With this configuration, a coating film in which blur at both edges of the coating film and variations in the blur are suppressed can be formed on a large-sized substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9391275-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022325397-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7813365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015093845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013089941-A1 |
| priorityDate |
2010-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |