| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a88adb47890c5c3f7cab7a238f4cd234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e777e0fb338ac4ff2b5b517d9226e365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c6362c35cb60bda9dccf11e277e59528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_22ed8ee5c7367bc73cbcb8a0ab9fe54c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0675 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21 |
| filingDate |
2011-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5278cca9688f1e7aa3d5e9155991f968
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bafce2543ab154e065996778e37a7acf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef4514065343c502c7f16cde9a97ae8b |
| publicationDate |
2014-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8854628-B2 |
| titleOfInvention |
Interferometric methods for metrology of surfaces, films and underresolved structures |
| abstract |
A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11604136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020007370-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11162897-B2 |
| priorityDate |
2010-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |