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publicationDate 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8847336-B2
titleOfInvention Micromechanical component having an inclined structure and corresponding manufacturing method
abstract In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.
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