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filingDate 2009-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a17fd3fd007fb41480bf12d838c8593
publicationDate 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8846533-B2
titleOfInvention Cleaning solution for substrate for semiconductor device
abstract A cleaning solution of the present invention contains a sodium ion, a potassium ion, an iron ion, an ammonium salt of a sulfuric ester represented by General Formula (1), and water, and each content of the sodium ion, the potassium ion, and the iron ion is 1 ppb to 500 ppb. ROSO 3 —(X)+ (1) where R is an alkyl group with a carbon number of 8-22 or an alkenyl group with a carbon number of 8-22, and (X)+ is an ammonium ion.
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