http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8841754-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05572
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-14181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-40
filingDate 2013-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_180f1f72973e47ec2e3e0bf98b76fafd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c35d40d949cc5a3d6db54077b5aee2bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e8dcf1d51ee66536f625df343ac152f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b931019a7e3a4f0ac559d4380b9ffa72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68de70fc13ed0fcec78bec2142b56ad9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d03517d153186d94b2b8288210d9ec24
publicationDate 2014-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8841754-B2
titleOfInvention Semiconductor devices with stress relief layers
abstract A semiconductor device having a via structure in a stress relief layer is provided. The semiconductor device may include an isolation layer on the circuit region, a stress relief layer on the via region, and a via structure in the stress relief layer and the substrate. The stress relief layer may have a thickness larger than that of the isolation layer and a stepped cross section.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10985057-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103098-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018247856-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017330789-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014167289-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615072-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615071-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9041218-B2
priorityDate 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010224876-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010224965-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009269905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7564115-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010297844-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008283959-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7960282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050070527-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011198721-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426285897
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239

Total number of triples: 58.