http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8821962-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c99e733c08b112a5580f5f68902a8170
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_79b5f9d76648dfc226a261cfb970de9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a662c1bca4be2d1bfe792a1ad516c373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7674065362c4d68cb3603d9fe0f8d0c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f21e78994121b6e21fdeec780dc0296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc1454fd19c0238fc7cc54e7ba891330
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-466
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K77-111
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-478
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-052
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-05
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02
filingDate 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb5ae99b357ca191f10da50a4d440b97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b7bf6dd5e95fc872c9af6cbb5f5ef39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76a2e037723dd22ae5552ab2db05d353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56945cda5db8cd05646b55d302fe6d7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3ec25ffc066611f319b170db3c723a5
publicationDate 2014-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8821962-B2
titleOfInvention Method of forming dielectric layer with a dielectric composition
abstract An electronic device, such as a thin-film transistor, includes a substrate and a dielectric layer formed from a dielectric composition. The dielectric composition comprises a dielectric material and a low surface tension additive. The low surface tension additive allows for the formation of a thin, smooth dielectric layer with fewer pinholes and enhanced device yield. In particular embodiments, the dielectric material comprises a lower-k dielectric material and a higher-k dielectric material. When deposited, the lower-k dielectric material and the higher-k dielectric material form separate phases.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3606297-A1
priorityDate 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6113988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5079300-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005244662-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007244279-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009234056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005208779-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01108254-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4707517-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6440642-B1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90878464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128334432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129252992
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128576193
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128190228
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7567878
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7080
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129218265
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128547714
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11006
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128160323
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11594
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128258189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID170671
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129117533
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25796
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138641
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127712958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129120752
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17775524
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127460394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID245601257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74116
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129713991
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127841356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127548820
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129964839
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23522605
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID243983077
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128636717

Total number of triples: 83.