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filingDate 2011-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8809909-B2
titleOfInvention High voltage III-nitride transistor
abstract A high voltage durability III-nitride semiconductor device comprises a support substrate including a first silicon body, an insulator body over the first silicon body, and a second silicon body over the insulator body. The high voltage durability III-nitride semiconductor device further comprises a III-nitride semiconductor body characterized by a majority charge carrier conductivity type, formed over the second silicon body. The second silicon body has a conductivity type opposite the majority charge carrier conductivity type. In one embodiment, the high voltage durability III-nitride semiconductor device is a high electron mobility transistor (HEMT) comprising a support substrate including a <100> silicon layer, an insulator layer over the <100> silicon layer, and a P type conductivity <111> silicon layer over the insulator layer. The high voltage durability HEMT also comprises a III-nitride semiconductor body formed over the P type conductivity <111> silicon layer, the III-nitride semiconductor body forming a heterojunction of the HEMT.
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