| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-14 |
| filingDate |
2013-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cceb5b151eaa5eb966d4e3a0fb562c67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cee3ea16eab0a0c1fcf70cfa6b6295bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c24579bfc7ccac52b15c48b8fa6eb0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_294c8b2f3e5907e921015fd4ee943881 |
| publicationDate |
2014-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8790465-B2 |
| titleOfInvention |
Post-deposition cleaning methods for substrates with cap layers |
| abstract |
One embodiment of the present invention is a method of fabricating an integrated circuit. The method includes providing a substrate having a metal and dielectric damascene metallization layer and depositing substantially on the metal a cap. After deposition of the cap, the substrate is cleaned with a solution comprising an amine to provide a pH for the cleaning solution of 7 to about 13. Another embodiment of the presented invention is a method of cleaning substrates. Still another embodiment of the present invention is a formulation for a cleaning solution. |
| priorityDate |
2007-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |