| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65ee3be1cb6eee16bbf7c330bcb762ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f03ab8da98eea01439a040374119b3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-41875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B23-0297 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B23-02 |
| filingDate |
2011-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ceba25408bd0d84753495621abbd7e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84899aa82c571052e71b1631ccc82df0 |
| publicationDate |
2014-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8781781-B2 |
| titleOfInvention |
Dynamic care areas |
| abstract |
Various embodiments for determining dynamic care areas are provided. In one embodiment, a first inspection process is performed on a wafer after a first fabrication step has been performed on the wafer and before a second fabrication process has been performed on the wafer. One embodiment includes determining care areas for a second inspection process based on inspection results generated by the first inspection process. The second inspection process will be performed on the wafer after the second fabrication step has been performed on the wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10190991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015362908-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615993-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10049441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10600175-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018276808-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9286675-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I751306-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017286589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9735064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10818000-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10018571-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10648925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10146036-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11204332-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10514685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180122032-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10339262-B2 |
| priorityDate |
2010-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |