| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-52 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2012-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf75e732e6ab762d13556b5a3ba48257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0395b3fcb475d084b3818788719b9394
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20b983f3fac43699d89fba214cab54a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb2ad2821b337509fb5ae4f827f541a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f80f582c7832c545c5764a928264a11 |
| publicationDate |
2014-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8778801-B2 |
| titleOfInvention |
Method for forming seed layer structure |
| abstract |
A seed layer comprises a bottom seed layer portion formed on the bottom of a via opening, a sidewall seed layer portion formed on an upper portion of the sidewall of the via opening and a corner seed layer portion formed between the bottom seed layer portion and the sidewall seed layer portion. The sidewall seed layer portion is of a first thickness. The corner seed layer portion is of a second thickness and the second thickness is greater than the first thickness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276431-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014332962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9159666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9892963-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11177168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015311150-A1 |
| priorityDate |
2012-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |