| abstract |
A radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation-sensitive acid generator. The first polymer includes a repeating unit (I) shown by the following general formula (1), a fluorine atom in a molecule of the first polymer. The second a polymer includes an acid-labile group, and is insoluble or scarcely soluble in an alkali. R 1 represents a hydrogen atom or the like, each of X 1 and R 2 represents a single bond or the like, R 3 represents a hydrogen atom or the like, and R 4 represents an acid-labile group. |