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publicationDate 2014-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8741386-B2
titleOfInvention Atomic layer deposition of quaternary chalcogenides
abstract Methods and systems are provided for synthesis and deposition of chalcogenides (including Cu 2 ZnSnS 4 ). Binary compounds, such as metal sulfides, can be deposited by alternating exposures of the substrate to a metal cation precursor and a chalcogen anion precursor with purge steps between.
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