| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_952fbde464d8171c2a5ed93661a9f3ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1f8782c8523deb89581dadc229f7a43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e89cc2c12f45d859e75fc319ba7d5a9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-52 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26F1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-1203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-1423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03K3-0231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-1228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-0025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03B5-1296 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 |
| filingDate |
2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fbe17023ceb2effaea9efe658f87688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6f3b72e4fdb1c3da75de5dd40dc6e5 |
| publicationDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8736026-B2 |
| titleOfInvention |
Method of generating a hole or recess or well in a substrate |
| abstract |
The present invention relates to a method of generating a hole or recess or well in an electrically insulating or semiconducting substrate, and to a hole or recess or well in a substrate generated by this method. The invention also relates to an array of holes or recesses or wells in a substrate generated by the method. The invention also relates to a device for performing the method according to the present invention. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011278648-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9427885-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013326870-A1 |
| priorityDate |
2009-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |