| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8b08ac64675ce4ca12b9e09018a27dd7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2448 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01T1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-077 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J49-10 |
| filingDate |
2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e41af0817de7d12c83d4edc2670bcb8a |
| publicationDate |
2014-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8716673-B2 |
| titleOfInvention |
Inductively coupled plasma source as an electron beam source for spectroscopic analysis |
| abstract |
A single column inductively coupled plasma source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the ICP to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9275828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013301794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9659743-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016172156-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9601312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9746431-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016181061-A1 |
| priorityDate |
2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |