Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f4246e8fcebf17c365aced017a04c61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f39d9875884873511cf6d37dd1b50acb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_195f9d3a5445ae7a77be37d466dfaf12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f64ab98f18c78ac3aa5a314bf48f28c http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa01f6c1306887aab1600030442343a8 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B23-2423 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-101 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B1-0008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-6852 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B1-00096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B1-043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B1-00172 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0071 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B6-00 |
filingDate |
2010-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90e4388f7fe77d6bb99368c817e98887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35e93f8d4a9e53b115fe7e815675fb5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6426bbdc82b5e555e971f228bce6771a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11f68cd0179ea81ee902063d4daf0fd0 |
publicationDate |
2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-8700134-B2 |
titleOfInvention |
Cantilever-based MEMS optical scanning apparatus, system and method |
abstract |
The present invention relates to an optical scanning apparatus and an optical scanning system The optical system includes an optical engine connected to an optical scanning probe The optical scanning probe images a sample at different lateral positions of the sample The optical scanning probe includes a housing having a longitudinal axis extending in a direction towards a sample to be scanned, a first base having a first moveable mirror supported thereon by a first cantilever connecting the first moveable mirror to the first base, a second base having a second moveable mirror supported thereon by a second cantilever connecting the second moveable mirror to the second base, and a support attaching the first and second bases so that the first moveable mirror and the second moveable mirror are disposed along the longitudinal axis apart from each other. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11536659-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018125925-A1 |
priorityDate |
2009-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |