| abstract |
A metal organic precursor, including a metal-chelate complex including a chelate including a Groups 3 to 12 metal ion, a chelating ligand, and an anion bound to the chelate, wherein the chelating ligand forms a reducing compound and a volatile material at a temperature of about 160° C. or lower, the anion forms a reducing compound and a volatile material at a temperature of about 180° C. or lower, and the metal-chelate complex is represented by Formula I: [L1-Me]pn+[A]qm− (I) wherein Me is the Groups 3 to 12 metal ion, L1 is the chelating ligand, A is the anion, n, m, p, and q are independently integers of 1 or more, n is the sum of a charge quantity of L1 and a charge quantity of Me, m is a charge quantity of A, and (n×p)=(m×q). |