| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_338facd9efb3de5cc76250e2f0d5588b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a193bbf98a93a588ed793bc48b9a7d3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-4833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1306 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-3278
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-487
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2012-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a835c4798e3057cf64f6d4e14140dc18 |
| publicationDate |
2014-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8673772-B2 |
| titleOfInvention |
Biosensor chip and a method of manufacturing the same |
| abstract |
A method of forming a biosensor chip enables a bond pad and detector electrode to be formed of different materials (one is formed of a connection layer such as copper and the other is formed of a diffusion barrier layer such as tantalum or tantalum nitride). A single planarizing operation is used for both the bond pad and the detector electrode. By using the same processing, resist patterning on an already-planarized surface is avoided, and the cleanliness of both the bond pad and detector electrode is ensured. Self-aligned nanoelectrodes and bond pads are obtained. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8835247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011062531-A1 |
| priorityDate |
2011-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |