| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_881ab19c1706b3436b5d06dc659edb93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e489719c5433b26a9352e6ea776969ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0320650f03d762aaedd08d6e29271599 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0812 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H3-02 |
| filingDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2c6858e32a349c9c2c30be5f32cfe32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f33fe6266ac19df74af5f55deb37264d |
| publicationDate |
2014-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8629393-B1 |
| titleOfInvention |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
| abstract |
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I794505-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10556042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019378684-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11177110-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10181402-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013218264-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714307-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10342900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11048162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016172197-A1 |
| priorityDate |
2010-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |