| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ffe60490302a46e2c77c42ba66fcfd73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e97979ee67c08066225995036a57c932
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa541994d77832628121ba0e84d9eb2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_30af90eb12642866d849a8ac1ebc37a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_334415014b386ff1d9461570b544e60d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c322d093de189e3d13ccafd86d714faf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0714
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0177 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-339 |
| filingDate |
2011-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37bc4ed3b8ed82a6117310afa5fdf9b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e97146d388487a8c2cad5581d65b0ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2a92490abbfde757cc475c41206ce7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72b87719e1f761ae2f6e8fa3f9b62e78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dfdbc12529b42f87a351bd72844da05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd98ddeaf4dd531038fce0247e2012cc |
| publicationDate |
2014-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8629011-B2 |
| titleOfInvention |
Epitaxial silicon CMOS-MEMS microphones and method for manufacturing |
| abstract |
A method of manufacturing a microphone using epitaxially grown silicon. A monolithic wafer structure is provided. A wafer surface of the structure includes poly-crystalline silicon in a first horizontal region and mono-crystalline silicon in a second horizontal region surrounding a perimeter of the first horizontal region. A hybrid silicon layer is epitaxially deposited on the wafer surface. Portions of the hybrid silicon layer that contact the poly-crystalline silicon use the poly-crystalline silicon as a seed material and portions that contact the mono-crystalline silicon use the mono-crystalline silicon as a seed material. As such, the hybrid silicon layer includes both mono-crystalline silicon and poly-crystalline silicon in the same layer of the same wafer structure. A CMOS/membrane layer is then deposited on top of the hybrid silicon layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758368-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9862594-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10280074-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11174154-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9890038-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9181086-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11317219-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9554213-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9906869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9266717-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10555091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9327965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508026-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9580302-B2 |
| priorityDate |
2011-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |