| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_754a9da274afac5cd28cbc7e7c349509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_91e6a9af8b8f57930733d7ac2efd805d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_479993dae49fcad938f850f47d5db744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b504461d3fce0c6bdd704c039c91ee81 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-743 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-00 |
| filingDate |
2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc63c97f7f8684c00f534905a7b84afd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_384ed48a76cb0b1accd4a93e69f976a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_904d724b09df394cb5ee6dab24cea323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ce66a3829bbc6304b736a820f3578a4 |
| publicationDate |
2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8618513-B2 |
| titleOfInvention |
Apparatus and methods for forming an electrical conduction path through an insulating layer |
| abstract |
One embodiment disclosed relates to an apparatus forming an electrical conduction path through an insulating layer on a surface of a substrate. A first radiation source is configured to emit radiation to a first region of the insulating layer, and a first electrical contact is configured to apply a first bias voltage to the first region. A second radiation source is configured to emit radiation to a second region of the insulating layer, and a second electrical contact is configured to apply a second bias voltage to the second region. The conductivities of the regions are increased by the radiation such that conductive paths are formed through the insulating layer at those regions. In one implementation, the apparatus may be used in an electron beam instrument. Another embodiment relates to a method of forming an electrical conduction path through an insulating layer. Other embodiments, aspects and features are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9390887-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9793089-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9418819-B2 |
| priorityDate |
2011-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |