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publicationDate 2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8617986-B2
titleOfInvention Integrated circuits and methods for forming the integrated circuits
abstract A method for forming an integrated circuit includes forming a first dielectric layer over a gate electrode of a transistor. An etch-stop layer is formed over the first dielectric layer. An opening is formed through the first dielectric layer and the etch-stop layer, exposing a source/drain (S/D) region of the transistor. A metal layer is formed in the opening, contacting the S/D region of the transistor. The metal layer has a surface that is at least partially substantially level with a first top surface of the etch-stop layer. A damascene structure is formed and coupled with the metal layer.
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