| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60fa5e0d2d3b27ae2e9efa39e15bf52c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c54e4a89471d126d380e02b53cf94ab6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d0a39ae831951d92452b3d7c4c16ebe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_938434f0734997cab126392bbb4ebfdd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-04 |
| filingDate |
2010-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cf113b6838dd3037bba6af34f4d49a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1b2ed515cd2ed9f57c3f1d4268d9986
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ffc6cc9833783a70458cfed1506c109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f9e0f014f1031a10a666730418e0ad1 |
| publicationDate |
2013-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8617960-B2 |
| titleOfInvention |
Silicon microphone transducer |
| abstract |
A capacitive microphone transducer integrated into an integrated circuit includes a fixed plate and a membrane formed in or above an interconnect region of the integrated circuit. A process of forming an integrated circuit containing a capacitive microphone transducer includes etching access trenches through the fixed plate to a region defined for the back cavity, filling the access trenches with a sacrificial material, and removing a portion of the sacrificial material from a back side of the integrated circuit. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9554213-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10556791-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018022600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9906869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9181086-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9448126-B2 |
| priorityDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |