http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8592606-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ca743ad0e0bcabfab2ba60d8987c048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cc1842f6a0d4c46ea11c41545359e558 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6086677985b292239f32f3f4d9dc357b http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28 |
| filingDate | 2010-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3b8ca7ccf1bd7d8382f49937a2f4422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74e2d9af9f4dc20a4a76e2849dee9b62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1374c7eacc31535bb4cd779feb13ea53 |
| publicationDate | 2013-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8592606-B2 |
| titleOfInvention | Liquid precursor for depositing group 4 metal containing films |
| abstract | The present invention is related to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR 1 )(OR 2 )(OR 3 ) wherein pyr* is an alkyl substituted pyrrolyl, wherein M is group 4 metals include Ti, Zr, and Hf; wherein R 1-3 can be same or different and selected from group consisting of linear or branched C 1-6 alkyls; preferably C 1-3 alkyls; R 4 is selected from the group consisting of C 1-6 alkyls, preferably branched C 3-5 alkyls substituted at 2, 5 positions to prevent the pyrrolyl coordinated to the metal center in η 1 fashion; n=2, 3, 4. Most preferably the invention is directed to (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium, (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium, and (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium. The invention is also directed to (cyclopentadienyl)(2,5-di-methylpyrrolyl)(bis(ethoxy))titanium. Deposition methods using these compounds are also contemplated. |
| priorityDate | 2009-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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