| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51191ae48933bc9e784669daba7cf558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49cac5c95d138cba19d1b22d89e4d325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4613464b809c54cfaff6a092a9362be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e0200fb607c5c3c3866f01d0dc1ba86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cb4605181474007000f177f761805613 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45542
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45546 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 |
| filingDate |
2010-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e213871cad4f47c2819505e00f5997a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaca30e2cbb34a9c9081c7fa65f2fc8e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b9794b2578992e1dc5653ee4cbf8288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f8a8d6c92646660d275163dfab0438e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c15553d3dcf22ca5d8f097dffd2415a0 |
| publicationDate |
2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8563096-B2 |
| titleOfInvention |
Vertical film formation apparatus and method for using same |
| abstract |
A method for using a vertical film formation apparatus includes performing a coating process inside the process container without product target objects present therein to cover an inner surface of the process container with a coating film, and then performing a film formation process inside the process container accommodating the holder with the product target objects placed thereon to form a predetermined film on the product target objects. The coating process alternately supplies the first and second process gases into the process container without turning either of the first and second process gases into plasma. The film formation process alternately supplies the first and second process gases into the process container while turning at least one of the first and second process gases into plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9362109-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10790137-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410856-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576790-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646194-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741386-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9401273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9905416-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9837263-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11133181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11367613-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9922817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069522-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10262854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10424477-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10818489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10199211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9824881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395917-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9564309-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543140-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10515794-B2 |
| priorityDate |
2009-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |