| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca6662c2fb44fe84020bdc6725c69e69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26de4145f952ff8f525b177c069592ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8bd22d6bffba20609d91d0210a42b986
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d88a779f702abda83758388ab1d890f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_35a0411f5e315d8585061e599e6c2749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3600f5c8c1e422cbe3a19f7bc58871e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2011-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbba6ac3e63ea25aea7fb740d3c555b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bc7b652885517a35eadc1cea63c8f26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5d5c9b8561d7a3286005c86421503a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f73101698436b7725429d74c5cd33ccb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c42c95afcc6af3060d682e4624dcda58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7c89aa5abb9bdcd00479d219a352c8a |
| publicationDate |
2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8563085-B2 |
| titleOfInvention |
Precursor composition, methods of forming a layer, methods of forming a gate structure and methods of forming a capacitor |
| abstract |
In a method of forming a layer, a precursor composition including a metal and a ligand chelating to the metal is stabilized by contacting the precursor composition with an electron donating compound to provide a stabilized precursor composition onto a substrate. A reactant is introduced onto the substrate to bind to the metal in the stabilized precursor composition. The stabilized precursor composition is provided onto the substrate by introducing the precursor composition onto the substrate after the electron donating compound is introduced onto the substrate. The electron donating compound is continuously introduced onto the substrate during and after the precursor composition is introduced. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437420-B2 |
| priorityDate |
2009-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |