| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_befdbf3c99a23387269c66d44bfbfdc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6972ffddf606ef42a121af6fe2d8f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99cdc7e824372c9e8fd1df8117400641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4a8e95fa7fe64b3885f26e8ee3515ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0518139b52a8925eebfd67c438ff6db2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14669 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-00 |
| filingDate |
2009-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc433f080e5cd1c3649543a9480a3177
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47a657e65b448975c067030773c747eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c6677ffec6355ae69d00fbb0c49d67c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b3143495e2ee73931181db8dadc32e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef641af6e9b52f91ddfcabcf7f9fd21b |
| publicationDate |
2013-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8556504-B2 |
| titleOfInvention |
Thermally decoupled micro-structured reference element for sensors |
| abstract |
A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9182286-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012269228-A1 |
| priorityDate |
2008-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |