| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75cee1e3d48ee4038986eb4e26da9136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa78807393933f7822f91c2b307e693c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98bae2cbd0b7bf09361b52a0413ac2be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8269326b8f160a18ab1c224bb750d6cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-772 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-70 |
| filingDate |
2011-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_472f229d2eeb7e367c9cc06d2f66d429
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3296e4c183ad830a04f12d69a737fb3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3399882036ac2a012035838caf158afe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf347ba12e6f776c487bb1f4f1b31f1b |
| publicationDate |
2013-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8551859-B2 |
| titleOfInvention |
Biosensors integrated with a microfluidic structure |
| abstract |
A biosensor with a microfluidic structure surrounded by an electrode and methods of forming the electrode around the microfluidic structure of the biosensor are provided. A method includes forming a gate or electrode in a first layer. The method further includes forming a trench in a second layer. The method further includes forming a first metal layer in the trench such that the first metal layer is in electrical contact with the gate or the electrode. The method further includes forming a sacrificial material in the trench. The method further includes forming a second metal layer over the sacrificial material and in contact with the first metal layer. The method further includes removing the sacrificial material such that a microfluidic channel is formed surrounded by the first and the second metal layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10330675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8674474-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10732189-B2 |
| priorityDate |
2011-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |