http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8537327-B2
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e2e6c7125d4e89f4c5df33139ab0932 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4e73e6123b4177e11d89da8ad578a0a |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136236 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 |
filingDate | 2011-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c15ed8571dc1750f419f11948d4ecee |
publicationDate | 2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-8537327-B2 |
titleOfInvention | Array substrate and manufacturing method thereof, liquid crystal display |
abstract | Embodiments of the disclosed technology relates to an array substrate, a manufacturing method thereof and a liquid crystal display. The method comprises: forming a gate metal film, applying photoresist on the gate metal film, patterning to form a gate line, a gate electrode and a gate line leading wire, and remain a part of photoresist on the gate line leading wire; sequentially depositing a gate insulating film, an active layer film and a source/drain metal film, applying photoresist on the source/drain metal film and patterning to form source/drain electrodes and a channel; lifting off the remained photoresist, the gate insulating film and the photoresist above the gate line leading wire; and then forming a protection layer and a pixel electrode. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9196631-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437149-B2 |
priorityDate | 2010-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.