http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8518481-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78941ed5a01bfbcd48376e1fdb485b19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5933538f2a5ad132ae256f673649bc10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_183a188029a2a0f389d0ac108002b890 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0816 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2400-046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-1079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0858 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502715 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00 |
| filingDate | 2011-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c9681393529ba90e2be0a87da2c95f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82db451f3e9ed92ebbb883e1ec7c852d |
| publicationDate | 2013-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8518481-B2 |
| titleOfInvention | Interconnect for MEMS device including a viscoelastic septum |
| abstract | Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided. |
| priorityDate | 2008-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.