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filingDate 2011-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2013-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d06b420d12656f097eced2563520480
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publicationDate 2013-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8507847-B2
titleOfInvention Microengineered multipole ion guide
abstract A microengineered multipole ion guide for use in miniature mass spectrometer systems is described. Exemplary methods of mounting rods in hexapole, octupole, and other multipole geometries are described. The rods forming the ion guide are supported in etched silicon structures defined in at least first and second substrates.
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Total number of triples: 44.