| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59b69154ec4367285669c3153b49358a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80db209118f805a20b63e8176f7e98bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_820c89360ab7c0d67d05260252db346b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3efae1572b54c08ba0eefac6438d740a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0198
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2457
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-887
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0369 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-231 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 |
| filingDate |
2012-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0c7d8091485c920231d3d64c59572e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_491988dda13d814ba311e1f744eecd2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2f6f290abafa96818d0b8d1fcb99254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e3399f73d55d7def972606115857bab |
| publicationDate |
2013-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8486512-B2 |
| titleOfInvention |
Pattern formation employing self-assembled material |
| abstract |
In one embodiment, Hexagonal tiles encompassing a large are divided into three groups, each containing ⅓ of all hexagonal tiles that are disjoined among one another. Openings for the hexagonal tiles in each group are formed in a template layer, and a set of self-assembling block copolymers is applied and patterned within each opening. This process is repeated three times to encompass all three groups, resulting in a self-aligned pattern extending over a wide area. In another embodiment, the large area is divided into rectangular tiles of two non-overlapping and complementary groups. Each rectangular area has a width less than the range of order of self-assembling block copolymers. Self-assembled self-aligned line and space structures are formed in each group in a sequential manner so that a line and space pattern is formed over a large area extending beyond the range of order. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11067893-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9666434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627202-B2 |
| priorityDate |
2008-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |