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publicationDate 2013-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8481128-B2
titleOfInvention Laser-based method for growing array of carbon nanotubes
abstract A method for growing an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface; (b) forming a catalyst film on the first substrate surface; (c) flowing a mixture of a carrier gas and a first carbon source gas over the catalyst film on the first substrate surface; (d) focusing a laser beam on the second substrate surface to locally heat the substrate to a predetermined reaction temperature; and (e) growing an array of the carbon nanotubes on the first substrate surface via the catalyst film.
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