| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31b1220216408a6076f55e0ba4ec1003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69807dcb72bf8fcbadc27b933fcc8184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_006575bba2d50320de36b1da2c412e9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_521c83f4e0bb4fd71582c640776bbc13 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-732 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B5-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B9-04 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C44-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
2011-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11d92ab47217812f156fce03a8093a11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa4d77deb18bac7cc9918f5402d6b4fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9712493edbada1f5fa38bb6da22c7c71 |
| publicationDate |
2013-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8475693-B2 |
| titleOfInvention |
Methods of making substrate structures having a weakened intermediate layer |
| abstract |
This invention provides composite semiconductor substrates and methods for fabricating such substrates. The composite structures include a semiconductor substrate, a semiconductor superstrate and an intermediate layer interposed between the substrate and the superstrate that comprises a material that undergoes a structural transformation when subject to a suitable heat treatment. The methods provide such a heat treatment so that the intermediate layer becomes spongy or porous, being filled with numerous micro-bubbles or micro-cavities containing a gaseous phase. The composite semiconductor substrates with structurally-transformed intermediate layers have numerous applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9528196-B2 |
| priorityDate |
2003-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |