| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23a3940902a2e22468acaf1b953a94aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d612222bfc91f4a3763d3d288ce7e0af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cc0cbf18909c0db83b7cdbbc901bd0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d9347bdc6af60dabeb0fd7e531aa5e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb6285096fec1893fb884495c9b3473a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68f68ac9170ba3dfd0025c1fb98be43f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_18e7055575cceacdf81bb7c1956211b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98e8cb9cb38fd5efe9b0208a9b9822ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-887 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate |
2012-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4eec5af3536bf47b678e0c780c581828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb6d791add804d655db02dfb0da429f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00f3f34b84a31e5ed4a81f7e580a414b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49d5ae4305f205468ee4cf705428d918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8c122c735152ddd19f9898f03ca7478
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43d5703c1fb3385674bf8ef1b6405639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d703e35634d9e81f8275c17ccc4e88c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1976ace4a5551e8525c5b3dabb2b536d |
| publicationDate |
2013-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8467047-B2 |
| titleOfInvention |
Systems and methods for detecting defects on a wafer |
| abstract |
Systems and methods for detecting defects on a wafer are provided. One method includes generating output for a wafer by scanning the wafer with an inspection system using first and second optical states of the inspection system. The first and second optical states are defined by different values for at least one optical parameter of the inspection system. The method also includes generating first image data for the wafer using the output generated using the first optical state and second image data for the wafer using the output generated using the second optical state. In addition, the method includes combining the first image data and the second image data corresponding to substantially the same locations on the wafer thereby creating additional image data for the wafer. The method further includes detecting defects on the wafer using the additional image data. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10062156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9008410-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9766186-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9766187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9619876-B2 |
| priorityDate |
2009-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |