Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a1cc775cc73a93190077876fcdacd76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_56a6ff802bf324f194b0ce55583e8140 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cad035fb9d12767b714f40f53738939a |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N50-01 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-00 |
filingDate |
2009-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2013-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7510bc63386e2ac42afddb46a0afe2bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c012f321f4261dd6c69456748ab6bc37 |
publicationDate |
2013-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-8456893-B2 |
titleOfInvention |
Magnetic tunnel junction (MTJ) to reduce spin transfer magnetization switching current |
abstract |
A MTJ that minimizes spin-transfer magnetization switching current (Jc) in a Spin-RAM to <1×10 6 A/cm 2 is disclosed. The MTJ has a Co 60 Fe 20 B 20 /MgO/Co 60 Fe 20 B 20 configuration where the CoFeB AP1 pinned and free layers are amorphous and the crystalline MgO tunnel barrier is formed by a ROX or NOX process. The capping layer preferably is a Hf/Ru composite where the lower Hf layer serves as an excellent oxygen getter material to reduce the magnetic “dead layer” at the free layer/capping layer interface and thereby increase dR/R, and lower He and Jc. The annealing temperature is lowered to about 280° C. to give a smoother CoFeB/MgO interface and a smaller offset field than with a 350° C. annealing. In a second embodiment, the AP1 layer has a CoFeB/CoFe configuration wherein the lower CoFeB layer is amorphous and the upper CoFe layer is crystalline to further improve dR/R and lower RA to ≦10 ohm/μm 2 . |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10026426-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217744-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9853087-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016104544-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10297300-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121500-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10211396-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11177431-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276226-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9306152-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9620706-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9660187-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9734850-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997699-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11545617-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10163976-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10937945-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11502243-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020235286-A1 |
priorityDate |
2007-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |