| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_40bfba4cd40e7445c13c3649f0553815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d145c3c73e0dbbc73e82fc681c71854d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8ace3886ad985680695e66f92b53552
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76f4e3abeae67ab55d53893f7d3c3c6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b66f827ff91932c3bb07cfc9204515f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_08630f639914fde0e1006684d07c99fe |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70958 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 |
| filingDate |
2008-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_979b7afb80c8211755b3338b11b71f0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ae483ae1eafdf1aee6209ab0ad03d28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e462f8510a4775c84acbe81964962172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96e10eee8aa8c757bf178a173bd91eff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4494e360ba6b407bc1e6848b5c3c65a |
| publicationDate |
2013-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8435726-B2 |
| titleOfInvention |
Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus |
| abstract |
A method of processing an optical element which has a substrate ( 110 ) and a layer system ( 120 ) applied to the substrate ( 110 ), wherein the layer system ( 120 ) in a starting condition has a plurality of volume defects ( 130 ), wherein the method includes at least partially filling at least one of the volume defects ( 130 ) with a filling material ( 140 ). Also disclosed is an associated method of manufacturing an optical element. |
| priorityDate |
2005-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |