http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8426235-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47743459f32e401ca307500e242609c7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0271 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00476 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c09c55919c01950930d7330f6ea1462 |
| publicationDate | 2013-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8426235-B2 |
| titleOfInvention | Method for manufacturing capacitive electromechanical transducer |
| abstract | A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012256518-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10073064-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013049527-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9752924-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9166502-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10119855-B2 |
| priorityDate | 2009-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.