| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5fb1ef3d790d3c8c52999edbe091e12e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_64e5cadfa8a7d596f9106715f7655286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4706d10142a8b5d5a55d46b00c40696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65a1ef570dd618ca1285f4a44fb7a7f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57d292cef0e28c5d6d5b0776c47a667b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_19d750a4ed7b8c2282fb215efb4ff2ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57327270160b29eaba53f514ec2c6454 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2475 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61F2-00 |
| filingDate |
2008-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e50d32b05606ddd70a08baa7036b0f06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68ad5cd97b3294616e5476d06a0b7e18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_172e88f566d1a22beee0f292e60543e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31d3cf9787ff2a99d3d3dc066c8dd125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bc00c2db260d1f7e46d7267b4b2bd8a |
| publicationDate |
2013-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8399795-B2 |
| titleOfInvention |
Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves |
| abstract |
This invention relates to a plasma surface modification process (and a corresponding a system) of a solid object ( 100 ) comprising creating plasma ( 104 ) by a plasma source ( 106 ), application of the plasma ( 104 ) to at least a part of a surface ( 314 ) of the solid object ( 100 ), generating ultrasonic high intensity and high power acoustic waves ( 102 ) by at least one ultrasonic high intensity and high power acoustic wave generator ( 101 ), wherein the ultrasonic acoustic waves are directed to propagate towards said surface ( 314 ) of the object ( 100 ) so that a laminar boundary layer ( 313 ) of a gas or a mixture of gases ( 500 ) flow in contact with said solid object ( 100 ) is thinned or destructed for at least a part of said surface ( 314 ). In this way, the plasma can more efficiently access and influence the surface of the solid object to be treated by the plasma, which speeds the process time up significantly. |
| priorityDate |
2007-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |