| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8371cc07b83dcd9efd5060999ff6e061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8e0d427cd00f8244d017fc13b03d452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a335e828b36bce501ef53755ba204de6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M3-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01M3-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01M3-40 |
| filingDate |
2009-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eac666c6fb376ee290bbf77d01330e6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4088f67f05547cc49bab7a09f7fbb367 |
| publicationDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8393197-B2 |
| titleOfInvention |
Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing |
| abstract |
Embodiments of the present invention employ measurement of argon as the means to detect the presence of an atmospheric leak in a processing chamber. Argon detected inside the process chamber is conclusive evidence of a leak. Furthermore, the amount of detected argon provides information on the rate of air entering through the leak. In one embodiment, leak detection takes place in the main plasma inside the processing chamber. In another embodiment, leak detection takes place in the self-contained plasma generated in a remote plasma sensor. Additional measurements can be performed, such as measuring the amount of oxygen, and/or the presence of moisture to help in detecting and quantifying outgassing from the processing chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10054959-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022128425-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11300983-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395955-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9454158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11635338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11733227-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10983537-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018233388-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10983538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021132015-A1 |
| priorityDate |
2008-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |