| abstract |
The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes 504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed. n After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample. n Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing. n The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample. |