http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8383469-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f5bf7ee150f58e31a5e52dcc3578fe55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82030f0ad36da715923ec5fc525ea5fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2011-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c0b964d067df815ca43ba51150a45501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac33c59fafc7c6b4909bc1c74b0e9fe2 |
| publicationDate | 2013-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8383469-B2 |
| titleOfInvention | Producing transistor including reduced channel length |
| abstract | A method of producing a transistor includes providing a substrate including in order a first electrically conductive material layer and a second electrically conductive material layer. The first electrically conductive material layer has a thickness. A resist material layer is deposited over the second electrically conductive material layer. The resist material layer is patterned to expose a portion of the second electrically conductive material layer. Some of the second electrically conductive material layer is removed to expose a portion of the first electrically conductive material layer. The second electrically conductive material layer is caused to overhang the first electrically conductive material layer by removing some of the first electrically conductive material layer. The second electrically conductive material layer, the first conductive material layer, and at least a portion of the substrate are conformally coated with an electrically insulating material layer having a thickness such that the thickness of the first conductive material layer is greater than the thickness of the electrically insulating material layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8633068-B2 |
| priorityDate | 2011-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.